JPH01179434U - - Google Patents
Info
- Publication number
- JPH01179434U JPH01179434U JP7632488U JP7632488U JPH01179434U JP H01179434 U JPH01179434 U JP H01179434U JP 7632488 U JP7632488 U JP 7632488U JP 7632488 U JP7632488 U JP 7632488U JP H01179434 U JPH01179434 U JP H01179434U
- Authority
- JP
- Japan
- Prior art keywords
- movable
- cleaning
- discharge
- spray
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000007921 spray Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7632488U JPH01179434U (en]) | 1988-06-10 | 1988-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7632488U JPH01179434U (en]) | 1988-06-10 | 1988-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01179434U true JPH01179434U (en]) | 1989-12-22 |
Family
ID=31301355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7632488U Pending JPH01179434U (en]) | 1988-06-10 | 1988-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179434U (en]) |
-
1988
- 1988-06-10 JP JP7632488U patent/JPH01179434U/ja active Pending
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